FIB Nanostructures, 1st Edition

  • Published By:
  • ISBN-10: 331902874X
  • ISBN-13: 9783319028743
  • DDC: 539.73
  • Grade Level Range: College Freshman - College Senior
  • 530 Pages | eBook
  • Original Copyright 2013 | Published/Released May 2014
  • This publication's content originally published in print form: 2013

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FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nanoscale, and substantially extends the range of possible applications of nanofabrication. FIB techniques are widely used in the semiconductor industry and in materials research for deposition and ablation, including the fabrication of nanostructures such as nanowires, nanotubes, nanoneedles, graphene sheets, quantum dots, etc. The main objective of this book is to create a platform for knowledge sharing and dissemination of the latest advances in novel areas of FIB for nanostructures and related materials and devices, and to provide a comprehensive introduction to the field and directions for further research. Chapters written by leading scientists throughout the world create a fundamental bridge between focused ion beam and nanotechnology that is intended to stimulate readers' interest in developing new types of nanostructures for application to semiconductor technology. These applications are increasingly important for the future development of materials science, energy technology, and electronic devices. The book can be recommended for physics, electrical engineering, and materials science departments as a reference on materials science and device design.

Table of Contents

Front Cover.
Other Frontmatter.
Title Page.
Copyright Page.
1: Focused Ion Beam (FIB) Technology for Micro- and Nanoscale Fabrications.
2: Epitaxial Ferroelectric Nanostructures Fabricated by FIB Milling.
3: Low-Current Focused Ion Beam Milling for Freestanding Nanomaterial Characterization.
4: Focused Ion Beam Milling of Carbon Nanotube Yarns and Bucky-Papers: Correlating Their Internal Structure with Their Macro-Properties.
5: Nanoscale Electrical Contacts Grown by Focused Ion Beam (FIB)-Induced Deposition.
6: Metal-Induced Crystallization of Focused Ion Beam-Induced Deposition for Functional Patterned Ultrathin Nanocarbon.
7: Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam.
8: Application of Ion Beam Processes to Scanning Probe Microscopy.
9: Fabrication of Needle-Shaped Specimens Containing Subsurface Nanostructures for Electron Tomography.
10: Fabrication Technique of Deformation Carriers (Gratings and Speckle Patterns) with FIB for Microscale/Nanoscale Deformation Measurement.
11: Controlled Quantum Dot Formation on Focused Ion Beam-Patterned GaAs Substrates.
12: Development of Functional Metallic Glassy Materials by FIB and Nanoimprint Technologies.
13: Nanostructured Materials Driven by Dielectrophoresis on Nanoelectrodes Patterned by Focused Ion Beam.
14: Focused Ion Beam-Assisted Nanoscale Processing and Thermoelectrical Characterization.
15: FIB Design for Nanofluidic Applications.
16: FIB Patterning of Stainless Steel for the Development of Nano-Structured Stent Surfaces for Cardiovascular Applications.
17: Evaluation of Damages Induced by Ga+-Focused Ion Beam in Piezoelectric Nanostructures.
18: Instabilities in Focused Ion-Beam-Patterned Nanostructures.
19: Nanostructures by Mass-Separated FIB.