High Permittivity Gate Dielectric Materials, 1st Edition

  • Published By:
  • ISBN-10: 3642365353
  • ISBN-13: 9783642365355
  • DDC: 537.24
  • Grade Level Range: College Freshman - College Senior
  • 489 Pages | eBook
  • Original Copyright 2013 | Published/Released June 2014
  • This publication's content originally published in print form: 2013

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'The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects.'.

Table of Contents

Front Cover.
Half Title Page.
Other Frontmatter.
Title Page.
Copyright Page.
1: Introduction to High-k Gate Stacks.
2: MOSFET: Basics, Characteristics, and Characterization.
3: Hafnium-based Gate Dielectric Materials.
4: Hf-based High-k Gate Dielectric Processing.
5: Metal Gate Electrodes.
6: VFB/VTH Anomaly in High-k Gate Stacks.
7: Channel Mobility.
8: Reliability Implications of Fast and Slow Degradation Processes in High-k Gate Stacks.
9: Lanthanide-based High-k Gate Dielectric Materials.
10: Ternary HfO2 And La2O3 Based High-k Gate Dielectric Films for Advanced CMOS Applications.
11: Crystalline Oxides on Silicon.
12: High Mobility Channels.
Fundamental Constants.
Periodic Table of the Elements.
Physical Constants of Semiconductors.
Physical Constants of Si, Ge, Gaas (values at 300 K).
Physical Constants of High Permittivity Dielectrics.
Electronegativity Table of the Elements.
Work Function Table of the Elements.