Piezoresistor Design and Applications, 1st Edition

  • Published By:
  • ISBN-10: 1461485177
  • ISBN-13: 9781461485179
  • DDC: 621.3815
  • Grade Level Range: College Freshman - College Senior
  • 245 Pages | eBook
  • Original Copyright 2013 | Published/Released June 2014
  • This publication's content originally published in print form: 2013

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Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications.  Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The  text concludes with an up-to-date discussion of the need for integrated MEMS  design and opportunities to leverage new materials, processes and MEMS technology.  Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.

Table of Contents

Front Cover.
Other Frontmatter.
Title Page.
Copyright Page.
1: Introduction.
2: Piezoresistance Fundamentals.
3: Sensitivity, Noise and Resolution.
4: Fabrication and Process Modeling.
5: Temperature Effects.
6: Design Optimization.
7: Alternative Materials and Transduction Methods.
Appendix A: Glossary of Mathematical Symbols.
Appendix B: Ion Implantation Lookup Tables.
Appendix C: Code.