eBook Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications, 1st Edition

  • Published By:
  • ISBN-10: 1447155416
  • ISBN-13: 9781447155416
  • DDC: 621.366
  • Grade Level Range: College Freshman - College Senior
  • 129 Pages | eBook
  • Original Copyright 2014 | Published/Released May 2014
  • This publication's content originally published in print form: 2014
  • Price:  Sign in for price



Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfluidics, micromechanics, microelectronics and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfluidic, optofludic and lab-on-a-chip devices and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfluidics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent and practical applications to biochemical analysis.

Table of Contents

Front Cover.
Other Frontmatter.
Title Page.
Copyright Page.
1: Introduction.
2: Current Techniques for Fabricating Microfluidic and Optofluidic Devices.
3: Fundamentals of Femtosecond Laser Processing.
4: Fabrication of Microfluidic Structures in Glass.
5: Fabrication of Fluid Control Microdevices.
6: Fabrication of Micro-Optical Components in Glass.
7: Selective Metallization of Glass.
8: Integration of Microcomponents.
9: Applications of Biochips Fabricated by Femtosecond Lasers.
10: Summary and Outlook.