eBook Comp Microsystems, 1st Edition

  • Published By:
  • ISBN-10: 0444521909
  • ISBN-13: 9780444521903
  • Grade Level Range: College Freshman - College Senior
  • 1903 Pages | eBook
  • Original Copyright 2007 | Published/Released May 2009
  • This publication's content originally published in print form: 2007
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Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.